MULTIGASTFS datasheet(2/2 Pages) MKS

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Specifications and

Ordering Information

MultiGas TFS - 10/18

Some MultiGas™ products may not be exported to many end user countries without both U.S. and local government export

licenses under ECCN 2B351. However, the MultiGas™ TFS™, as described above, is controlled under EAR99 and therefore is

excluded from most CCL-based export licensing requirements. MKS does not warrant the future accuracy of these statements.

The exporter is solely responsible for satisfying applicable export laws. Some Baratron® capacitance manometer products may

not be exported to many end user countries without both US and local government export licenses under ECCN 2B230.

Specifications are subject to change without notice. mksinst™, MultiGas™, and TFS™ are trademarks and Baratron® is a

registered trademark of MKS Instruments, Inc., Andover, MA. Swagelok® and VCR® are registered trademarks of Swagelok

Marketing, Co., Solon, OH. Viton® is a registered trademark of E.I. Dupont Co., Wilmington, DE.

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel:

978.645.5500

Tel:

800.227.8766 (in USA)

Web: www.mksinst.com

MKS Instruments, Inc.

Process & Environmental Analysis Solutions

651 Lowell Street

Methuen, MA 01844

Tel:

978.645.5500

Please contact your local MKS office for price and availability information.

Analyzer

Measurement Technique

IR absorption using Tunable Filter Spectrometry

Measurable Gases

All IR active gases

Gas Cell Path Length

10 meter, with proprietary high throughput folded path design

Update Rate

1 - 120 seconds (software configurable)

Calibration

Factory calibrated; no recalibration required

Zero Drift

<15 ppb per day (typical)

Optics Purge Flow

0.2 L/min of dry nitrogen or CO

2 - free clean, dry air with dewpoint below -70°C

Pressure Transducer

MKS Baratron® capacitance manometer to compensate for sample pressure variations

Purge Connection

1/8'' Swagelok®

Dimensions

19'' W x 7'' H x 25'' D (48.3 cm W x 17.8 cm H x 64.5 cm D)

Installation

19'' rack mount chassis

Power

120 VAC, 60 Hz, 3.3A / 230 VAC, 50 Hz, 1.7A

Weight

35 lbs. (16kg)

Sampling Parameters

Sample Temperature

10 - 50°C (nominal)

Sample Flow

0.5 L/min (nominal)

Sample Pressure

1 atm ±0.1 (nominal)

Gas Cell

Construction

Nickel coated Al

Fittings

4 Swagelok VCR®

Tubing

¼'' stainless steel

Mirrors

Nickel plated aluminum substrate, with rugged gold coating

Windows

ZnSe

O-rings

Viton®

Communication Options

Communication Protocol

Modbus TCP/IP or Modbus RS-485

Four, 4 – 20 mA analog output

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