Microwave Power

Generator available

in power levels of 1.8 and

3 kW

mODEL ax2500 sERIEs

INTELLIGENT mICROWaVE pOWER GENERaTORs

experience in designing rugged, reliable microwave power generators for demanding

semiconductor fabrication and industrial applications. The compact AX2500 design

architecture incorporates field-proven technology, and combines new design features aimed

at improved performance and lower cost of ownership.

The SmartPower AX2500 Series consists of two models that cover a spectrum of

continuous microwave power from 180 W to 3 kW. Model AX2518 has maximum

performance of 1.8 kW and 3 kW for the AX2530. Frequency output is 2.455 GHz ±15 MHz.

Features & Benefits

• Availablein1.8and3kWpowerlevels

for 200 and 300mm applications

• Microprocessor-controlledfilament

cutback extends magnetron tube

lifetime. Field-replaceable magnetron

tubes lower overall CoO

• Accuratepowermeasurementand

feedback ensures high repeatability

• Compact,modulardesignenhances

cross-platform compatibility