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MicroChemical
Systems
P RELIMINARY
D ATA
S HEET
MiCS-2610 Preliminary Data Sheet Rev 2
Page 3 of 4
Electrical Specifications
Maximum Ratings:
Rating
Symbol
Value / Range
Unit
Maximum Heater Voltage
VH
2.5
V
Maximum Sensor Supply Voltage
VCC
5
V
Maximum Heater Power Dissipation
PH
90
mW
Maximum Sensor Power Dissipation
PS
1
mW
Relative Humidity Range
RH
15
−
95
%RH
Ambient Operating Temperature
Tamb
0
−
50
°C
Storage Temperature Range
Tsto
-40
−
+70
°C
Storage Humidity Range
RHsto
15
−
95
%RH
Table 1
Operating Conditions:
Parameter
Symbol
Typ
Min
Max
Unit
Heating Voltage,
VH
2.35
2.30
2.40
V
Heating Current,
IH
34
28
36
mA
Heating Power,
[1]
PH
80
65
87
mW
Heating Resistance,
RH
69
66
81
Ω
Table 2
[1]
Min and Max values for the heating power are obtained by combining VH, min. with RH, max and VH, max. with RH, min, respectively.
Sensitivity Characteristics:
Characteristic
Symbol
Typ
Min
Max
Unit
O3 Detection Range
FS
10
10000
ppb
Sensing Resistance at 50 ppm
RS
70*
20*
200*
k
Ω
Sensing Resistance at 100 ppm
RS
140*
40*
400*
k
Ω
Sensitivity Factor
[2]
SR
2.0*
1.5*
4.0*
-
Table 3
[2]
Sensitivity Factor SR is defined as RS at 100ppb of O3 divided by RS at 50ppb of O3. Test conditions are 50±5 %RH and
25±2°C.
*
Values are subject to changes before the final datasheet is published.
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