MEMS Mass Flow Sensor

D6F-03A3-000

1

MEMS Mass Flow Sensor

D6F-03A3-000

Compact, sensors featuring MEMS

technology for precision mass airflow

measurement

• Precision unidirectional mass airflow up to 3 LPM

• Stable output across full scale

• Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm

• Low power consumption

Application Examples

• Pick and place systems

• Industrial processes

• Leak detection

• Spectroscopy

• Mass flow controllers

• Scientific / test equipment

• Environmental comfort controls

• Fuel cell controls

Ordering Information

*Dry gas must not contain large particles, e.g., dust, oil, mist.

■ Rating

Absolute maximum rating

Model

Case

Applicable Gas

Flow Range

D6F-03A3-000

Thermoplastic resin / Aluminum alloy

Air*

0 – 3 LPM

D6F-Cable2

Item

Term

Ratings

Unit

Power-supply voltage

V

CC

26.4

VDC

Output voltage

V

OUT

6VDC