MEMS Flow Sensor

D6F-P0010A

Ordering Information

Model

Wiring

Flow range

D6F-P0010A1

1L/min

1L/min

-

D6F-P0010A2

D6F-CABLE2

Gas

Case

PCB-mounting model

Air

PBT

PBT

-

Cable connector assembly

-

Air

Connector model

Electrical Performance

Item

Symbol

Rating

Unit

5 – 10

VDC

VDC

0.5 – 2.5

Power supply voltage

Vcc

Vout

Output voltage

Sensor Specifications

Model

D6F-P0010A1

D6F-P0010A2

Termination

PCB Terminals

Connector JST SM03B-SRSS-TB

Storage humidity

85%RH max (without freezing and condensation)

Insulation resistance

20M Ohm min.(DC 500VDC, between lead terminal and case)

Flow range/ Pressure range

+ 1.0 SLM (+ 0.84 in H2O)

Applicable gas

Air (contact Omron for other gases)

Accuracy

Temperature characteristic

Operating temperature

-10 to 60 deg C (without freezing and condensation)

Operating humidity

Storage temperature

Output signal

Withstand pressure

Current consumption

+/- 5% F.S. (typical test results within +/- 2% F.S.)

+/- 5% F.S.

85%RH max (without freezing and condensation)

-40 to 80 deg C (without freezing and condensation)

Analog 0.5 to 2.5 VDC, Amplified and Temperature Compensated

50kPa (7psi)

Max 15mA (No load, Vcc=5 VDC, 25 deg C)

MEMS Mass Flow Sensor

D6F-P

1

Compact, Highly Reliable Flow-Sensor

with Unique Dust Segregation System

• Cyclone flow structure diverts particulate from sensor element

• PCB-mounted & connector models available

• High accuracy, reliable mass flow measurement

• Alternative to differential pressure sensing

• Measure over 200 LPM with a bypass set-up