1

Motorola Sensor Device Data

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon

pressure sensor designed for a wide range of applications, but particularly those

employing a microcontroller or microprocessor with A/D inputs. This patented, single

element transducer combines advanced micromachining techniques, thin–film metalliza-

tion, and bipolar processing to provide an accurate, high level analog output signal that

is proportional to the applied pressure.

Features

• 5.0% Maximum Error over 0° to 85°C

• Ideally Suited for Microprocessor or Microcontroller–Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Durable Epoxy Unibody Element

• Temperature Compensated over *40° to +125°C

Figure 1. Fully Integrated Pressure Sensor Schematic

VS

3

X–ducer

SENSING

ELEMENT

1

Vout

2

GND

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

PINS 4, 5 AND 6 ARE NO CONNECTS

MAXIMUM RATINGS(1)

Parametrics

Symbol

Value

Unit

Overpressure(2) (P1 > P2)

Pmax

75

kPa

Burst Pressure(2) (P1 > P2)

Pburst

100

kPa

Storage Temperature

Tstg

– 40 to +125

°C

Operating Temperature

TA

– 40 to +125

°C

1. TC = 25°C unless otherwise noted.

2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Senseon and X–ducer are trademarks of Motorola, Inc.

Order this document

by MPX5010/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

MPX5010

SERIES

INTEGRATED

PRESSURE SENSOR

0 to 10 kPa (0 to 1.45 psi)

0.2 to 4.7 V OUTPUT

PIN NUMBER

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect

to external circuitry or ground. Pin 1

is noted by the notch in the Lead.

BASIC CHIP

CARRIER ELEMENT

CASE 867–08, STYLE 1

DIFFERENTIAL

PORT OPTION

CASE 867C–05, STYLE 1

1

2

3

Vout

Gnd

VS

4

5

6

N/C

N/C

N/C

REV 2