SFM3200 datasheet(5/7 Pages) ETC2

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Version 1 – July 2016

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4. Instructions for Use

4.1

Calibration orientation

The sensors are calibrated horizontally as depicted in the

following graph:

4.2

Design guidelines

In order to provide good flow conditions, the inner

diameter of the connecting tube has to be approximately

the same as the inner diameter of the SFM3200 main flow

channel. The inlet tube has to be straight and at least 10

cm in length. The SFM3200 is equipped with meshes on

the in- and outlets of the flow channel to reduce

turbulences and thus improve the stability.

Please refer to the application note “Inlet conditions for the

SFM3000 Mass flow meters” for more information.

Additionally, it is recommended to avoid placing the

sensor such that the sensing element is at the bottom.

This helps prevent deposition of matter (such as dust

particles or water droplets) on the sensing element.

4.3

Temperature compensation

The SFM3200 sensor features digital temperature

compensation. The temperature is measured on the

CMOSens® chip by an on-chip temperature sensor. This

data is fed to a compensation circuit that is also integrated

on the CMOSens® sensor chip. Thus, no external

temperature compensation is necessary.

4.4

Sensor handling

The packaging method of the CMOSens chip together with

the inert housing and the sealing materials ensure a tight

and highly resistant sealing of the device. Please be

aware that aggressive and corrosive gases can influence

the sensor element and may even destroy the sealing or

the plastics body.

Please also be careful with the use of explosive or toxic

gases. Any leakage even outside the controller can be

dangerous.

For the above reasons, Sensirion guarantees the safe use

of the CMOSens® Mass Flow Meter for inert, in-explosive

and non-toxic gases only.

The SFM3200 sensor is designed to be robust and shock

resistant. Nevertheless, the accuracy of the high-precision

SFM3200 can be degraded by rough handling. Sensirion

does not guarantee proper operation in case of improper

handling. Note: avoid applying mechanical stress.

4.5

ESD

The electronics of the SFM3200 sensor consist of a single

automotive qualified chip. It complies with the following

ESD norms:

AEC Q 100 002 (4kV HBM)

AEC Q 100 003 (200V MM)

Although the sensor complies with these norms, it does

not mean the sensor is immune against ESD.

The sensor is shipped in an antistatic tray to prevent

electrostatic discharge. To avoid damage to the sensor,

ground yourself using a grounding strap or by touching a

grounded object before touching the sensor. Furthermore,

store the parts in an antistatic package when not in use.

4.6

I2C Interface and communication

Due to I2C interface restrictions, the cable length from the

sensor to the microprocessor is recommended to be as

short as possible and certainly not above 30 cm. For wires

longer than 10 cm it is mandatory to shield the SDA and

SCL.

In case data is read from the sensor, the first data byte of

the transaction must always be acknowledged by the

master.

It must be possible to reset the sensor through a hard

reset, i.e. powering off and on the sensor, in case the

sensor freezes.

I2C Communication details are given in the application

note “I2C Functional Description for SFM3000 series”.

5. Ordering Information

Use the part names and product numbers shown in the

table below when ordering SFM3200 sensors. For the

latest product information and local distributors, visit

www.sensirion.com.

Part name

Product Number

SFM3200

1-101051-01

Packaging units: 30 items/tray.

Every sensor is traceable by a unique Serial Number.

Positive flow direction (as marked on the sensor)

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