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SM5321 Datasheet(PDF) 2 Page - Silicon Microstructures, Inc.

Part # SM5321
Description  Gauge & Differential Pressure Sensors
PDF  11 Pages
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Manufacturer  SMI [Silicon Microstructures, Inc.]
Direct Link  https://www.si-micro.com/
Logo SMI - Silicon Microstructures, Inc.

SM5321 Datasheet(HTML) 2 Page - Silicon Microstructures, Inc.

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Silicon Microstructures, Inc. 2001-2017. All rights reserved
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
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DOC # 40DS5960.05
SM5221, SM5321 & SM5421 Series
www.si-micro.com
Absolute Maximum Ratings
All parameters are specified at Vdd = 3.3 V supply voltage at 25oC, unless otherwise noted.
No.
Characteristic
Symbol
Minimum
Typical
Maximum
Units
1
Supply Voltage
VDD
2.7
6.00
V
2
Supply Current
IVDD
4.00
mA
3
Update Period
2
mS
4
Compensated Temperature
-20
+85
°C
5
Operating Temperature(a)
TOP
-40
+105
°C
6
Storage Temperature(a)
TSTG
-40
-
+125
°C
7
Media Compatibility(a,b)
8
Proof Pressure(a, c)
PProof
12
psi
9
Burst Pressure(a, d)
PBurst
15
psi
Notes:
a. Tested on a sample basis.
b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum.
c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after
returning to the operating pressure range
d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
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