20

MEMS Mass Flow Sensor

D6F-03A3-000

Characteristics

* Contact Omron for other gases.

Operating Characteristics

D6F-03A3-000

D6F-03A3-000

Model

D6F-03A3-000

Flow rate @ 0

°C and 101.3 kPa

0-3L/min

Case material

Thermoplastic resin

Applicable gas*

Air

Electrical connection

Connector (3 wire)

Withstand pressure (max.)

200kPa (about 30 psi)

Accuracy

±5% F.S. max of detected characteristics at 25

°C

Operating temperature

0 to 50

°C (with no icing or condensation)

Storage temperature

-10 to 60

°C (with no icing or condensation)

Operating and Storage humidity 85% RH max (with no icing or condensation)

Power supply voltage

10.8 to 26.4 VDC

Output signal

1 to 5 VDC, Analog Output (Load resistance: 10k

Ω)

Current consumption

15 mA max. (No-Load with V

Insulation resistance

20M

Ω min. at 500 VDC, between lead terminal and case

Dielectric strength

500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and case

0.0

0.6

1.2

1.8

2.4

3.0

Flow rate(L/min)

6.0

5.0

4.0

3.0

2.0

1.0

0.0

Flow Rate (LPM)

0

0.6

1.2

1.8

2.4

3.0

Output Voltage (VDC) 1.00

± 0.2

2.83

± 0.2

3.77

± 0.2

4.34

± 0.2

4.72

± 0.2

5.00

± 0.2