MEMS Mass Flow Sensor

D6F-03A3-000

21

Test Results (typical performance)

(5 samples, repeated 10 times each)

Dimensions

Unit: mm

D6F-03A3-000

Note: 1. When installing the pipes, use M5 screws for the joints and tighten to a torque of 1.5 N•m max. Use sealing tape to make the joints airtight.

2. Mount to a flat surface using an M3 pan head screw, tightened to 0.59 N•m max. torque.

Applicable Cable for D6F-03A3-000 (Optional - sold separately)

part number: D6F-CABLE2

Note: Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information”

for correct use.

-3.0

-2.0

-1.0

0.0

1.0

2.0

3.0

0.0

0.5

1.0

1.5

2.0

2.5

3.0

Flow Rate (lpm)

Inlet

Outlet

M5 screw

(Effective depth: 4.5)

3.1

+0.15

−0.05

+0.15

−0.05

3.4 dia.

36.6

14

16.8

3.1

dia. through holes

8

6.8

Two, M3

screw holes

3: Vcc

1: GND

Enlarged

view

Mounting Hole Dimensions

2: Vout

Connect using the following from JST;

Housing: SHR-03V-S-B or SHR-03V-2

Terminal: SH-003T-P0.2

Wire: 28-32 AWG

15

±3

(5)

180

±10

White wire

Black wire

Red wire

1. GND

2. Vout

3. Vcc