1

D6F-P

MEMS Flow Sensor

A Compact, High-accuracy Flow

Sensor with Superior Resistance

to Environments.

• Anti-dust performance is improved using the Cyclon method.

• A full lineup of models with different connector types: barb

joints, lead terminals for direct mounting on-board, and mani-

folds.

• High accuracy of

±5% FS.

Ordering Information

Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.

Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.

Output Voltage Characteristics

D6F-P0001A1

Measurement conditions: Power supply voltage of 12

±0.1 VDC, ambient tem-

perature of 25

±5°C, and ambient humidity of 35% to 75%.

D6F-P0010A1/-P0010A2/-P0010AM2

Measurement conditions: Power supply voltage of 1

±0.1 VDC, ambient temper-

ature of 25

±5°C, and ambient humidity of 35% to 75%.

RoHS Compliant

Refer to the Safety Precautions on page 4.

Model

Applicable fluid (See note 1.)

Flow rate range

Minimum order

D6F-P0001A1 (Lead terminals)

Air (See note 2.)

0 to 0.1 L/min.

25

D6F-P0010A1 (Lead terminals)

0 to 1 L/min.

25

D6F-P0010A2 (Connector)

25

D6F-P0010AM2

(Connector manifold mount)

25

D6F-CABLE2 (Optional)

(A2 and AM2)

−−

25

Flow rate

L/min (normal)

0

0.02

0.04

0.06

0.08

0.10

Output voltage

V

0.50

±0.10

0.90

±0.10

1.30

±0.10

1.70

±0.10

2.10

±0.10

2.50

±0.10

3.0

2.5

2.0

1.5

1.0

0.5

0.0

0.02

0.04

0.06

0.08

0.10

0

Flow rate (L/min)

Flow rate

L/min (normal)

0

0.25

0.50

0.75

1.00

Output voltage

V

0.50

±0.10

1.60

±0.10

2.10

±0.10

2.31

±0.10

2.50

±0.10

3.0

2.5

2.0

1.5

1.0

0.5

0.0

0.25

0.5

0.75

1

0

Flow rate (L/min)