2

D6F-P

MEMS Flow Sensor

Characteristics/Performance

Note: 1. A 0 to 1 L/min. (normal) volumetric flow rate at 0

°C, 101.3 kPa.

Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)

Note: 3. Reference (typical)

Model

D6F-0001A1

D6F-P0010A1

D6F-P0010A2

D6F-P0010AM2

Flow Range (See note 1.)

0 to 0.1 L/min

0 to 1 L/min

Calibration Gas (See note 2.)

Air

Flow Port Type

Barb joint

Maximum outside diameter: 4.9 mm

Manifold

Electrical Connection

Lead terminals

Lead terminal

Three-pin connector

Power Supply

4.75 to 5.25 VDC

Current Consumption

15 mA max. with no load and a Vcc of 5.0 V

Output Voltage

0.5 to 2.5 VDC (Load resistance: 10 k

Ω)

Accuracy

±5% FS (25°C characteristic)

Repeatability (See note 3.)

±1.0% FS

±0.4% FS

Output Voltage (Max.)

3.1 VDC (Load resistance: 10 k

Ω)

Output Voltage (Min.)

0 VDC (Load resistance: 10 k

Ω)

Rated Power Supply Voltage

10 VDC

Rated Output Voltage

4 VDC

Case

PBT

Degree of Protection

IEC IP40

Withstand Pressure

50 kPa

Pressure Drop (See note 3.)

0.005 kPa

0.19 kPa

0.67 kPa

Operating Temperature

−10 to 60°C (with no condensation or icing)

Operating Humidity

35% to 85% (with no condensation or icing)

Storage Temperature

−40 to 80°C (with no condensation or icing)

Storage Humidity

35% to 85% (with no condensation or icing)

Temperature Characteristics

±5% FS for 25°C characteristic at an ambient temperature of -10 to 60°C

Insulation Resistance

Between Sensor outer cover and lead terminals: 20 M

Ω min. (at 500 VDC)

Dielectric Strength

Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)

Weight

8.5 g

8.0 g