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C1210 Datasheet(PDF) 2 Page - IMP, Inc

Part # C1210
Description  Process C1210 CMOS 1.2mm Zero Threshold Devices
PDF  4 Pages
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Manufacturer  IMP [IMP, Inc]
Direct Link  http://www.ds-imp.com.cn/index.asp
Logo IMP - IMP, Inc

C1210 Datasheet(HTML) 2 Page - IMP, Inc

  C1210 Datasheet HTML 1Page - IMP, Inc C1210 Datasheet HTML 2Page - IMP, Inc C1210 Datasheet HTML 3Page - IMP, Inc C1210 Datasheet HTML 4Page - IMP, Inc  
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48
C1210-4-98
Process C1210
Diffusion & Thin Films
Symbol
Minimum
Typical
Maximum
Unit
Comments
Well (field) Sheet Resistance
ρ
N-well(f)
0.6
1.0
1.3
K
Ω/
n-well
N+ Sheet Resistance
ρ
N+
20
35
50
Ω/
N+ Junction Depth
xjN+
0.35
µm
P+ Sheet Resistance
ρ
P+
50
75
100
Ω/
P+ Junction Depth
xjP+
0.35
µm
Gate Oxide Thickness
TGOX
24
nm
Field Oxide Thickness
TFIELD
800
nm
Gate Poly Sheet Resistance
ρ
POLY2
15
22
30
Ω/
Bottom Poly Sheet Res.
ρ
POLY1
35
Ω/
Metal-1 Sheet Resistance
ρ
M1
50
m
Ω/
Metal-2 Sheet Resistance
ρ
M2
30
m
Ω/
Passivation Thickness
TPASS
200+900
nm
oxide+nit.
Capacitance
Symbol
Minimum
Typical
Maximum
Unit
Comments
Gate Oxide
COX
1.28
1.38
1.58
fF/
µm2
Metal-1 to Poly-1
CM1P
0.057
fF/
µm2
Metal-1 to Silicon
CM1S
fF/
µm2
Metal-2 to Metal-1
CMM
0.035
fF/
µm2
Poly-1 to Poly-2
CP1P2
0.69
0.86
1.03
fF/
µm2
Electrical Characteristics



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