MEMS Gauge Pressure Sensor

2SMPP

39

Note: 1. Measured points are 0

°C, 25°C, 50°C and 85°C at 0 to 50 kPa.

2. Drive current: 100

μA

3. These output voltage characteristics are measured with tester without a mounting board.

4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual

equipment before use.

Pressure cycle range (0 to 75 kPa)

Note: 1. Tested temperature condition: 25

°C

3. Rated cycle pressure: 0 to 75 kPa

4. These output voltage characteristics are measured with tester without a mounting board.

Temperature [°C]

-1.0

-0.5

0.0

0.5

1.0

2.0

1.5

0

-10

10

20

30 40

50 60

70 8090

-2.0

-1.5

-1.0

-0.5

0.0

0.5

1.0

1.5

2.0

2.5

3.0

0

-10

10 20 30

40 50

60 70

8090

Temperature [°C]

1

0

-1

-0.5

0.5

0

25000

50000

75000

100000

Pressure cycle

Pressure cycle

1

0

-1

-0.5

0.5

0

25000

50000

75000

100000